Fraunhofer Institute for Electronic Nano Systems ENAS

Booth: 2D-05
Exhibition: MEMS SENSING & NETWORK SYSTEM 2022
Exhibit Booth: Tohoku University Micro System Integration Center

Exhibit Highlights

Your expert and development partner in the field of smart systems and MEMS

Packaging technologies:
wafer and chip bonding
Parylene deposition
additive methods in packaging
electrochemical deposition of Al

MEMS and printed devices:
inertial sensors
optical devices
CMUT
printed humidity sensor
smart patch

MEMS-based systems:
optical quality monitoring of electroplating
fluid property sensor
gyrocompass
monitoring of soil and plants
heart failure implant
spheres for process monitoring in bioreactors


Product 1
Product 2
Product 3

Product 1 Sample New Product Video Pdf

MEMS and packaging technologies

- processes for reactive and inductive bonding as well as bonding by Parylene
- Parylene deposition for layers combined with metallization and substrates for sensors and PCBs
- deposition technologies (electrochemical deposition for aluminum) and printing technologies (screen and aerosol jet printing) for packaging
- 3 D packaging cluster (deposition, pre and post treatment, Pick & Place)


FactSheets_Technologies_EN_FraunhoferENAS.pdf
(Downloaded)

(Viewed)

Product/technology Category
Fabrication Technology / Evaluation & Measurement / Analysis Technology & Tool
Microfabrication (front-end , etching , deposition , lithography etc.), Printed electronics, Microfabrication (back-end , mounting , packaging etc.)
Service / Business model
Research and development institutions / University

Application Field
Semiconductor / Electrical Equipment & Component, Optical parts and devices, Automobile / Logistics / Transporting, Medical Device, Printing / Converting business, Converting business on commission, Clothing / Grocery, Surface Treatment, University / Research Organization, Foreign Representative / International Organization

Solutions
Sensing, SDGs

Product 2 Sample New Product Video Pdf

MEMS and printed devices

- inertial sensors: high-precision acceleration sensors and gyroscopes
- optical devices: tunable Fabry-Pérot interferometer, MOEMS based on aluminum nitride
- capacitive micromachined ultrasonic transducer for medical devices, gas flow and chemical sensors
- printed humidity sensor based on nanoparticles
- smart patch manufactured by screen printing


FactSheets_MEMS-devices_EN_FraunhoferENAS.pdf
(Downloaded)

(Viewed)

Product/technology Category
Device
Mechanical sensor (Pressure / Acceleration / Gyro), Actuator, Electronic compass, Optical MEMS, Environmental sensor (Temperature / Humidity / Gas), Flexible sensor
Service / Business model
Research and development institutions / University

Application Field
Semiconductor / Electrical Equipment & Component, Optical parts and devices, Precision Equipment / Industrial Machinery / Robotics, Automobile / Logistics / Transporting, Aerospace, Medical Device, Analytical and Measurement Instrument, Food & Beverage, Clothing / Grocery, Electric Utility / Gas / Oil / Other energy, Fishery / Agriculture / Mining, University / Research Organization, Foreign Representative / International Organization

Solutions
Sensing, SDGs

Product 3 Sample Demo New Product Video Pdf

MEMS-based systems

- optical quality monitoring system of electroplating solutions with short measurement times
- fluid property sensor for detection density and viscosity
- gyrocompass independent of magnetic fields and GPS connectivity
- low-cost sensors for monitoring of soil and plants
- implant for hemodynamic monitoring
- fully autarkic sensor spheres for process monitoring in bioreactors


FactSheets_MEMSbased-systems_EN_FraunhoferENAS.pdf
(Downloaded)

(Viewed)

Product/technology Category
Application
Environment & Energy, Smart Life & Smart Community, Aerospace, Healthcare & Medical, Life Sciences / Wearable / Sports, Automobile, Autonomous, Food / Agriculture, Smart Monitoring System, Wireless Network System
Service / Business model
Research and development institutions / University

Application Field
Optical parts and devices, Precision Equipment / Industrial Machinery / Robotics, Automobile / Logistics / Transporting, Aerospace, Medical Device, Analytical and Measurement Instrument, Food & Beverage, Clothing / Grocery, Surface Treatment, Fishery / Agriculture / Mining, University / Research Organization, Foreign Representative / International Organization

Solutions
Sensing, SDGs

Press Release

Inductive bonding: A new bonding method in microsystems technology

2022-01-26_PressRelease_inductive-bonding_MSNS2022_FraunhoferENAS_EN.pdf

Contact

*The following information is provided to enable inquiries to exhibitors.
Unauthorized use and reproduction for any other purpose is prohibited.

Fraunhofer Institute for Electronic Nano Systems ENAS

Technologie-Campus 3, Chemnitz Germany 09126

TEL : +49 371 45001-0
URL : http://www.enas.fraunhofer.de
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