SCIL Nanoimprint Solutions
- 資料PDF
- 動画
- 新製品
- デモ
- サンプル
- ブース内プレゼン
出展ブース : Netherlands Pavilion
出展のみどころ
Low cost, high volume, high precision Nanoimprint Lithography solutions
We offer cost effective, robust, high yield solutions for making nano-structures on wafers using a unique and proprietary lithography technology (SCIL). These nano-structures are used a range of products to increase performance, lower costs and increase functionality.
It can be used to make patterns with feature sizes down to less than 10 nm and overlay alignment below 1 µm on up to 300mm wafers.
製品・サービス 1 ブース内プレゼン サンプル デモ 新製品 動画 資料PDF
AutoSCIL - High volume Nanoimprint Lithography tool
The fully automatic nanoimprint system includes all essential process steps in a closed coupled system: wafer handling, pre-aligning, spin-coating, SCIL imprinting, baking and cooling.
AutoSCIL brochure.pdf
製品・サービス 2 ブース内プレゼン サンプル デモ 新製品 資料PDF
FabSCIL - High volume Nanoimprint Lithography cluster module
The FabSCIL module can imprint 200 and 300mm wafers and has automatic stamp loading and positioning. It is designed to be docked to a cluster system that takes care of wafer handling, aligning, spin-coating, baking, cooling and other processes.
FabSCIL.pdf
製品・サービス 3 ブース内プレゼン サンプル デモ 新製品 資料PDF
LabSCIL -
The low volume SCIL tool is especially developed for R&D labs at Universities, Research Institutes and companies who are interested to develop SCIL processes and applications. Also for companies interested in a tool that can be used for small series pilot production the low volume SCIL tool will be ideal.
LabSCIL.pdf
製品・サービス 4 ブース内プレゼン サンプル デモ 新製品 資料PDF
SCIL NanoGlass Imprint Resist
To enable our customers to produce the highest quality imprints, we have developed a range of innovative materials including special stamp and sol-gel (NanoGlass) imprint materials.
NanoGlass.pdf
連絡先情報
下記情報は来場者から出展者への事前アポイント・問合せを目的に公開しています。
それ以外の目的(セールス等)で無断に使用・転載する事を固く禁じます。
SCIL Nanoimprint Solutions
De Lismortel 31, Eindhoven Netherlands 5612AR
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URL : http://www.scil-nano.com |