Fraunhofer ENAS
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Exhibition: MEMS SENSING & NETWORK SYSTEM 2021
Exhibit Highlights
Fraunhofer ENAS: Your System and Technology Partner in Smart Systems Integration
Fraunhofer ENAS is your development partner in the field of Smart Systems and their integration for various applications. It has specialized on the challenge of combining micro and nano sensors, actuators and electronic components with interfaces for communication and a self-sufficient energy supply to form smart systems, thus supporting the Internet of Things and the ongoing digitalization.
Product 1 Presentation Video PDF
Permanent wafer bonding techniques ba Fraunhofer ENAS
Permanent wafer bonding techniques are used in microelectronics and micromechanics to join thin, polished wafers made of different materials together - with or without additional intermediate layers.
General requirements::
Low temperatures (< 400 °C)
Material compatibility
Mechanical stability
Most cases: hermetic sealing
Minimized bonding frame width
Dr. Mario Baum
mario.baum@enas.fraunhofer.de
Waferbonding.pdf  |
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Product 2 Presentation New Product Video PDF
Piezoelectric actuators and sensors for medical technology
Microsystems based on piezoelectric aluminum nitride (AlN) offers the advantage of a high miniaturization potential. The technical developments include AlN-based microscanners with integrated position sensors for one or two-dimensional deflection of laser beams for application in high-precision, endoscopic systems for medical technology.
Katja Meinel
katja.meinel@enas-extern.fraunhofer.de
Piezoelectric_ActuatorsSensors_EN.pdf |
Video |
Product 3 Presentation Video
Ultra-thin and highly flexible PCB for tracking systems and wearables
An advanced, ultra-thin and highly flexible PCB of only 20 µm thickness.with multiple redistribution layers is presented. In the project Fraunhofer ENAS develops the flexible PCB of Parylene and MEMS with TSV.
The advantageous substrate properties are transparency, biocompatibility, and chemical stability to realize a versatile platform for flexible electronics.
franz.selbmann@enas.fraunhofer.de
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Video |
Contact
*The following information is provided to enable inquiries to exhibitors.
Unauthorized use and reproduction for any other purpose is prohibited.
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Fraunhofer ENAS
Fraunhofer Institute for Electronic Nano Systems ENAS Technologie-Campus 3, Chemnitz Germany 09126
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TEL : +49 371 45001-0 URL : https://www.enas.fraunhofer.de |