The Power of Direct Writing by Heidelberg Instruments
-from 8nm to Greyscale Lithography and High Throughput Maskless Exposure-
13:15-14:00
Heidelberg Instruments KK
Mr. Hideo Jotaki
【Abstract】
Introduction of latest direct writing solution. DWL series' High Quality Greyscale Lithography, MLA series' high throughput maskless lithography and 8nm lithography by Nano Frazor System